Hydrolysis protection and sintering of aluminum nitride powders with yttria nanofilms

نویسندگان

چکیده

Aluminum nitride (AlN) is a promising material for electronic substrates and heat sinks. However, AlN powders react with water that adversely affects final part properties necessitates processing in organic solvents, increasing the cost of parts. Small quantities yttrium oxide (Y2O3) are commonly added to particles enable liquid phase sintering. To mitigate reaction water, particle atomic layer deposition (ALD) was used coat conformal films Y2O3 prior densification powder processing. When were coated 6 nm thick amorphous Y2O3, hydrolysis significantly suppressed over 48 h, demonstrating nanofilms on act as barrier coating an aqueous solution. addition by ALD sintered high relative densities (≥90% theoretical) after sintering at 1800°C 50 min.

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ژورنال

عنوان ژورنال: Journal of the American Ceramic Society

سال: 2022

ISSN: ['0002-7820', '1551-2916']

DOI: https://doi.org/10.1111/jace.18310